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发明名称
VERFAHREN ZUR HERSTELLUNG INTEGRIERTER SCHALTUNGEN
摘要
申请公布号
DE3135815(A1)
申请公布日期
1982.05.19
申请号
DE19813135815
申请日期
1981.09.10
申请人
GENERAL ELECTRIC CO.
发明人
GHEZZO,MARIO
分类号
H01L29/78;H01L21/316;H01L21/32;H01L21/76;H01L21/762;(IPC1-7):H01L21/76;H01L21/31
主分类号
H01L29/78
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