发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the damage of a chip by a method wherein the chip is placed on a chip mounting surface of a package base body, and the chip is held again by means of tweezers and oscillated so as to be sufficiently parallel with the chip mounting surface when fitting a die. CONSTITUTION:The chip 1 is held by means of tweezers 2, and carried and placed onto the package substrate 3, and the tweezers 2 are separated from the chip 1. The noses of the tweezers 2 are contacted with the substrate 3. The noses of the tweezers are elevated only by a predetermined distance d, and the chip is held a gain, and oscillated left and right so that the chip and the chip mounting surface of the substrate run parallel sufficiently. Accordingly, the die can be fitted without damaging the chip.
申请公布号 JPS5745250(A) 申请公布日期 1982.03.15
申请号 JP19800120771 申请日期 1980.09.01
申请人 FUJITSU KK 发明人 AOKI TSUYOSHI;YANO JIYUNICHI
分类号 H01L21/52;H01L21/677;H01L21/68;H01L21/687 主分类号 H01L21/52
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