| 摘要 |
PURPOSE:To increase sensitivity of detection by projecting lights from different directions using plural number of lights sources to the position of an object to be inspected to check defects and detect the scattered light through a slit shutting out direct light. CONSTITUTION:Lights coming from two light sources 2, 2', being arranged on both sides of a dark-colored plate 7, are projected to the detection range of a TV-panel 1. The scattered light is received by a detector 4 through a slit 5 of a slit type shielding plate 3. If necessary, the detection part is illuminated by light sources 10, 10'. The TV-panel 1 is moved in the direction of the arrow, and continuous detection is performed. This method increases detection sensitivity of the equipment. |
