| 摘要 |
PURPOSE:To simplify a circuit processing and to reduce a measurement error, by a method wherein a thin semiconductor piece is placed at an open end of a throttle mechanism positioned in a line, and a flow is measured from the displacement amount of a distortion amount sensor formed at a stress collecting part. CONSTITUTION:A throttle mechanism 17, which has an opening at a center, is mounted in a line 15 wherein a fluid flows in a direction of an arrow mark A. A silicon semiconductor substrate 19, of which a body of a flow measuring head part 18 consists, is firmly adhered to the open end of the throttle mechanism 17. The semiconductor substrate 19 has a perforation 20 for fluid passage which coincides with an opening 16 of the mechanism 17, and a thin semicondutor piece 21 is formed at the periphery of the perforation 20. A distortion amount sensor 22 is mounted at the stress collecting part of the thin semiconductor piece 21, and a flow in the line 15 is measured from the displacement amount of the distortion amount sensor 22. This simplifies a circuit processing, reduces a measurement error due to a pressure loss, accelerates a response speed to the measurement, permits the supper- miniaturization of a device, an enables attaching of the device to even a very small line. |
