发明名称 PACKAGING METHOD OF ELECTRONIC PARTS
摘要 PURPOSE:To electromagnetically shield an element, enable to miniaturize a circuit, increase the productivity and cut down the cost for the subject electronic parts by a method wherein, after a hybrid IC and the like have been sealed by resin, an element is electromagnetically shielded by tightly adhering and forming a metal shielding layer, having a prescribed thickness, on the outer surface of the resin layer. CONSTITUTION:For example, sensitivity-increasing and activating processes are performed by coating a Pd film on almost the whole surface of the hybrid IC1 whereon a resin layer 3 was formed, for example, using a powder fluidized bed coating method. Then, after a copper layer of 0.2-0.3mum in thickness has been formed by performing nonelectrolytic plating, a shielding layer 4, consisting of a copper layer of 10-200mum in thickness formed by performing electro-plating, is formed. Also, as occasion demands, the shielding layer 4 is protected by coating an insulating layer on it. As the resin layer 3 and the shielding layer 4 are formed along the concavo-convex part of the elements 11 and 12 on the circuit 1, a high density and small-sized circuit 1 can be manufactured. Also, as a result of the above, the mas- production and automation of the parts can be accomplished, thereby enabling to cut down the cost of the products.
申请公布号 JPS5734354(A) 申请公布日期 1982.02.24
申请号 JP19800109952 申请日期 1980.08.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 TSUKAO RIYUUSAKU;MORIHIRO YOSHIYUKI;TAKASAGO HAYATO
分类号 H05K9/00;H01L23/28;H01L23/552;H05K1/02;H05K3/28 主分类号 H05K9/00
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