| 摘要 |
PURPOSE:To make it possible to obtain a large laser output having no lowering and no fluctuation, by installing a gas-blowing fan and a gas-heating heater on the upstream side of a ctalyst. CONSTITUTION:A regeneration circulator 6 is provided with a laser gas-blowing fan 7 and a gas-heating heater 8 on the upstream side of a catalyst tube 9 wound with a forced heat insulation heater 10. Thereby, because a laser gas is introduced to the heater 8 at a flow velocity determined according to the fan 7, the gas is heated efficiently. In addition, because the gas heated to a high temperature is blown against the catalyst tube 9, the catalyst therein acts highly excellently. Moreover, the flow rate fluctuation due to the heater heating temperature ripple hardly occurs and in addition, the gas flow rate increases. Accordingly, it is possible to obtain a large output having less fluctuation and no lowering. |
