MOS TRANSISTOR FORMED ALL BY IMPLANTATION AND METHOD OF PRODUCING SAME

摘要

A MOSFET structure having DMOS characteristics fabricated using all implantation only without the use of time-consuming diffusion. Particularly the critical length of the channel is controlled by beveling one edge of an oxide layer to a predetermined slope thereby allowing transferral of ions to the substrate through the beveled edge only to a predetermined depth thereof before being completely shielded. The result is a channel having a closely controlled length to thus be relatively very short for very fast switching of low or high voltage signals.