| 摘要 |
PURPOSE:To decrease the effects of induced noises and the like and to enable the describing to be performed highly accurately by providing at least parts of a blanking circuit and a deflection circuit in the vicinity of electrodes in an electrooptical lens-barrel and sharing the grounding potential of said circuits with the lens-barrel. CONSTITUTION:The electron beam is controlled by blanking electrodes 3 and deflection electrodes 4 provided in the lens-barrel 1 in the exposing apparatus. In said apparatus, the blanking circuit 13 and the deflection circuit 14 constituting a control circuit 15 are provided in the vicinity of the electrodes 3 and 4 in the lens- barrel 1 having a shield 20. The reference potential (grounding) is shared by said circuits 13 and 14 and the lens-barrel 1. The control circuit 15 and the circuits 13 and 14 are insulated and connected by plugs 18 and 19 and a coaxial cable 17 via transformer 22. In this constitution, the effects of induced noises and error potentials on the elements in the circuits 13 and 14, e.g., an operating unit 21 and the like, can be prevented, and mounting conditions of the elements can be eased. |
