TRANSMISSION MASK AND ELECTRON BEAM EXPOSURE DEVICE PROVIDED WITH SAME,申请号JP19880227758-传众专利搜索

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发明名称	TRANSMISSION MASK AND ELECTRON BEAM EXPOSURE DEVICE PROVIDED WITH SAME
摘要
申请公布号	JPH0276216(A)	申请公布日期	1990.03.15
申请号	JP19880227758	申请日期	1988.09.12
申请人	FUJITSU LTD	发明人	TAKI KAZUTAKA;SAKAMOTO JUICHI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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