| 摘要 |
PURPOSE:To arrange a spherical lens readily and highly precisely by providing V grooves in parallel with a light emitting surface in front of said light emitting surface of an element on a heat sink, and supporting a lens supporting rod on the V grooves. CONSTITUTION:Regions 11, which are provided on the specified positions along the directions of (110) and (1-10) on the (100) surface of an Si substrate 6', are linked by two stripes of windows, and an SiO2 mask 10 is formed. Deep groove 13 and shallow grooves 7 are formed by anisotropic etching, and gold is evaporated on the substrate 6'. The grooves 7 are cut in the middle. Transparent quartz fiber 15 having a specified diameter and length is diffused, and a spherical part having a lens function is formed at the tip of a supporting rod 15'. A laser chip 19 is brazed 20 at the position separated by a focal length of a lens 17 from the end surface of a lens accommodating groove 8 on a heat sink 14. The lens supporting rod is fixed to the V groove 7 which is in parallel with the light emitting surface 21 by resin 22 in front of said light emitting surface 21. In this constitution, the laser beam whose spreading angle is extremely small can be obtained. |
