| 摘要 |
PURPOSE:To quickly analize ions in a very short time by assembling the captional ion analyzer with an energy analyzer which separates and expands the generated ions, a plural number of tetrode mass spectroscopes, and a detector which detects the ions passing through these analyzers separately. CONSTITUTION:Energy beam 2, such as ion beam, etc. is irradiated on a sample 1. An analyzed ion 3 generated from the irradiated point is projected on an analytical electric field E provided above the sample 1 and separated depending upon the energy possessed by the ion. This electric field E is created by electrodes 4 and 4'. Each analyzed ion is projected on a mass filter 5 through a slit plate 6. The ion passing through the mass filter 5 is projected on a secondary electron multiplier detector 8 through an output slit plate 7 and detected by every Q mass filter independently. The detection signals obtained by every Q mass filter are sent to a computer 9 and processed. Thus ions can be analyzed quickly in a short time. |
