| 摘要 |
PURPOSE:To obtain high precision by eliminating an error due to a contact potential difference by performing a chemical plating treatment after smoothing surfaces of metallic parts such as housing, oscillating electrodes, a detection electrode, and an electric-field shielding block. CONSTITUTION:Surfaces of metallic parts, such as housing 1, electric-field modulators 2 made of oscillating electrodes, a detection electrode 3, and an electric-field shielding block 4, are somoothed by lapping, etc., to the same state. Then, they are chemically plated with the same metal having a small tendency to ionization, e.g. gold and silver. A probe is formed by using thus treated metallic parts, so that no contact potential difference is developed among contact surfaces of the metallic parts. Thus, an error due to the contact potential difference is eliminated to improve the precision. |
