| 摘要 |
PURPOSE:To efficiently vapor-deposit a high purity metal on a semiconductor substrate or the like by finishing the upper surface of a boat using BN and TiB2 as materials in a smooth state and the sides and the upper surface in a rough state. CONSTITUTION:The recessed upper surface of a boat for vapor deposition as a resistance heating body using BN and TiB2 as materials in finished in a smooth state, and the sides and the upper surface in a rough state. By this shape molten metal for vapor deposition easily crawls out of the recess along the upper surface of the boat toward the higher temp. part to increase the evaporation speed. On the other hand, the molten metal hardly moves to the side and the under surface of the boat, so the evaporated metal sufficiently coats a semiconductor substrate. |
