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发明名称
PROJEKTIONS-DRUCKGERAET
摘要
申请公布号
DE3104007(A1)
申请公布日期
1981.12.03
申请号
DE19813104007
申请日期
1981.02.05
申请人
CANON K.K.
发明人
OMATA,TAKASHI
分类号
H01L21/30;G03F9/00;H01L21/027;(IPC1-7):G03F9/00;G03F7/26
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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