| 摘要 |
<p>A networking system for semiconductor manufacturing equipment is provided to detect update of the job file in the semiconductor manufacturing equipment in real-time and manage the changed job file in a server. The server(200) transfers the job file and manages the updated job file in real-time. The semiconductor manufacturing equipment(300,400,500) receives the job file from the server and transfers the updated job file to the server in real-time. The server includes a master transceiver(210) transceiving the job file and the updated job file with a slave transceiver(310) of the semiconductor manufacturing equipment, a database(230) storing the job file and the updated job file, and a processor(220). The processor stores the updated job file received from the master transceiver to the database and transmits the job file stored in the database to the master transceiver. The semiconductor manufacturing equipment includes the slave transceiver and a job file managing unit(320).</p> |
