发明名称 METHOD FOR PRODUCING COMPOSITION FOR FORMING DIELECTRIC FILM ,COMPOSITION FOR FORMING DIELECTRIC FILM AND METHOD FOR PRODUCING SAME
摘要 <p>A method of producing a dielectric-film-forming composition including: (a) dissolving a metal hydroxide including a metal A which is at least one metal selected from Li, Na, Ca, Sr, and Ba and at least one of a metal alkoxide and a metal complex including a metal B which is at least one metal selected from Ti, Zr, Hf, Ta, and Nb in an organic solvent to prepare a solution; and (b) allowing a precursor in the solution prepared in the step (a) to react.</p>
申请公布号 EP1860068(A1) 申请公布日期 2007.11.28
申请号 EP20040819949 申请日期 2004.12.03
申请人 JSR CORPORATION 发明人
分类号 C01G23/00 主分类号 C01G23/00
代理机构 代理人
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