SUBSTRATE PROCESSING METHOD

摘要

Provided is a substrate processing method wherein efficiencies of drainage and exhaust by centrifugal force and a rotor are improved. The substrate processing method is provided with a sample stage (2) for placing a substrate (1) to be processed, a spin rotor (3) arranged in the sample stage (2), and a supply nozzle (4) for supplying a liquid from the center portion of the spin rotor (3). The liquid supplied from the supply nozzle (4) is discharged by rotation of the spin rotor (3) in the outer circumference direction of the substrate (1) to be processed.