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发明名称
摘要
申请公布号
JPS56134748(U)
申请公布日期
1981.10.13
申请号
JP19800031092U
申请日期
1980.03.12
申请人
发明人
分类号
H01L21/673;H01L21/50;H01L21/67;H01L21/68;H05K13/02;H05K13/04;(IPC1-7):H01L21/68
主分类号
H01L21/673
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代理人
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