| 摘要 |
PURPOSE:To obtain a liquid jet recording head which is highly durable and highly reliable by preventing an electrode from elution with a simple structure, by a method wherein a first layer is composed of any one metal to be selected from Ta and W, a second layer is composed of any one metal to be selected from Au, Cu, and Al, and a third layer is composed of any one metal to be selected from Ta and W. CONSTITUTION:A heating resistance layer of Ta-N-SiO2 is formed on a substrate 111 by a public known sputtering method. Then, after forming a heating resistance layer 112, Ta is formed thereon by 500Angstrom sputter, and Au is successively sputtered by 2mum. Then, a form of a wiring conductor is formed by using photolithography, and the wiring conductor is processed by a public known ion sealing method. Then, a form of the heating resistance layer 112 is formed by using photolithography, Ta is sputtered by 0.5mum, and an unnecessary part (parts other than the wiring conductor and the heating resistance layer) is removed by ion sealing by using photolithography.
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