Membrane vacuum pump providing oil free primary vacuum - uses membrane fixed over plate and electromagnetically operated plate to alternately compress opposite sides of membrane

摘要

The oscillating membrane vacuum pump is used to generate primary vacuum for high vacuum pumps which require a primary vacuum before they can operate. The vacuum produced by the membrane pump is free from oil mist pollution. The device includes a neoprene membrane which is laid over a stainless steel plate. The membrane is drawn tight over the edges of the plate and has holes round its periphery to allow air to exhaust to atmosphere. The inlet air is drawn through a hole in the centre of the stainless steel plate when the membrane is raised above the surface of the plate. Electromagnets attract alternately the ends of a flexible steel plate which flattens one half of the membrane against the plate then progressively draws the other half down forcing air out the exhaust holes.