ELECTRON BEAM SYSTEM,申请号GB19780018816-传众专利搜索

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发明名称	ELECTRON BEAM SYSTEM
摘要
申请公布号	GB1598219(A)	申请公布日期	1981.09.16
申请号	GB19780018816	申请日期	1978.05.10
申请人	IBM CORP	发明人
分类号	H01L21/027;H01J37/147;H01J37/30;(IPC1-7):H01J37/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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