| 摘要 |
PURPOSE:To obtain a precise positioning device capable of a minute movement, by forming the DC servo system by use of a special linear motor. CONSTITUTION:The magnetic path members 1 forming a number of magnetic fields are arranged in parallel and rectilinearly with same spaces so that the directions of the magnetic paths 2 are set opposite and alternately to each other. Thus a stator 3 is obtained. The driving coil 6 capable of a free movement and consisting of two coils 4 and 5 is installed within the magnetic field to form a linear motor. The stage 14 is provided to the coil 6 and then controlled by the position detector 9 to ensure a precision control of the stage 14 within a minute range of the linear motor. With addition of the memory devices 12 and 13, the current amplifiers 7 and 8 having a variable ratio of magnification, and others, a DC servo system is formed over the entire range of the linear motor. In such way, a precision positioning device can be obtained with a minute movement secured. |
