发明名称 PRODUCTION OF SENSOR FOR DETECTING FLOW SPEED AND FLOW RATE
摘要 <p>PURPOSE:To lower costs and improve accuracy of resistance value and reliability by making spiral grooves in a platinum film formed by thick-film techniques, by laser working. CONSTITUTION:Paste prepd. by dispersing platinum powder in an org. vehicle is coated on the outside surface of an insulating pipe 1 consisting of ceramics or glass, and is dried, after which it is heated, whereby a platinum film 2 is formed on the outside surface of the insulating pipe 1. After this, spiral grooves 3 are made by laser working to the platinum film 2 in such a manner as not to allow the platinum to remain in the parts of said grooves 3, whereby the platinum resistance film having prescribed resistance value is formed. Electrode terminals 4 are provided to both ends thereof. Further, amorphous glas is coated on the platinum resistance film and the grooves 3, and is dried, whereby a glass coated film 5 is formed. Thereby, the costs are lowered through the utilization of thick-film techniques and the resistance value having high accuracy is obtained through the utilization of laser working.</p>
申请公布号 JPS56106159(A) 申请公布日期 1981.08.24
申请号 JP19800007832 申请日期 1980.01.28
申请人 HITACHI LTD 发明人 ARIMA HIDEO;ITOU MITSUKO;IKEGAMI AKIRA;UENO SADATEI;SATOU KANEMASA;NISHIMURA YUTAKA
分类号 G01F1/68;G01F1/692;G01K7/22;G01P5/12;H01C7/02;H01C17/065;H01C17/242 主分类号 G01F1/68
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