| 摘要 |
PURPOSE:To obtain a magnetic recording medium which has the magnetic properties suited to the high-density recording and can withstand the repetitive use, by introducing the oxygen gas only in the early process when a ferromagnetic thin film is formed on the base material by the cluster ion beam deposit method. CONSTITUTION:A high vaccum state is secured within the vaccum tank 1 via the exhaustion port 13, and then the electric conduction is given to the electrode 213. Then the sealed-up crucible 211 is heated up to increase the vapor pressure of the ferromagnetic evaporation source material 6 within the crucible 211 as well as tube 3. The vapor of the material 6 is jetted into the tank 1 through the jetting hole 212 and then receives an over-cooling by the heat insulation expansion, thus forming a cluster. The heat electron discharged from the filament 221 of the ionizing device 22 is accelerated by the mesh-type electrode 222 to have a collision against the cluster and the oxygen molecule and then to be ionized. The cluster ion and the oxygen ion generated are accelerated by the acceleration electrode 23 and then jetted onto the base component 5 to form a thin layer of the metal oxide on the component 5. The introduction of oxygen is discontinued when the thickness of the thin layer reaches the prescribed value, and then only the cluster ion beam deposit is carried out. |
