PLASMA DISCHARGE ION SOURCE

摘要

PLASMA DISCHARGE ION SOURCE The specification discloses an ion source in which a compound of the material of a desired ion is dissociated in a plasma discharge process between an anode and a cathode to provide a beam of charged particles including the desired ions. The proportion of the desired ion in the particle beam is selected by adjustment of the temperature of the plasma beyond that which was previously attainable in ion sources of this type. This is achieved by disposing a pair of magnetic members adjacent the ends of the anode so as to constrict the magnetic fields at the ends of the anode.