| 摘要 |
PURPOSE:To obtain an accurate measurement for distance by a method wherein two moving position markers are displayed to overlap scanned image of a sample and information signal wave form, and a distance between the markers is calculated from the intervals in which a marker signal is generated. CONSTITUTION:From turning a switch 19 to contact C side and other switches 7, 8, 14 to contact A side at a stage of observing a scanned image, two maker signals generated from coincidence detection circuits 15, 16 at every scanning in X direction are supplied to a grid G of CRT 9, and two bright lines stretching in Y direction are displayed on a screen to overlap the scanned image. After adjusting the coincidence detection circuits 15, 16 so that the bright lines come the position roughly on a portion to measure, the marker position is fine adjusted thrugh wave form display. Then, a distance between the markers is calculated on an arithmetic unit 20 according to marker-generated interval measured value and scale factor data from a scale factor setting circuit 13, and the result is displayed. According to this constitution, a distance of a minute part of sample can be measured accurately. |
