| 发明名称 |
MASK SUBSTRATE FOR ELECTRONIC DEVICE |
| 摘要 |
PURPOSE:To effectively inhibit the occurrence of pinholes in sputtering by mirror- polishing a peripheral part of a mask substrate for an electronic device. CONSTITUTION:Peripheral part 1a of mask substrate 1 is mirror-polished. Part 1a is preferably chamfered prior to the mirror polishing. |
| 申请公布号 |
JPS5646227(A) |
申请公布日期 |
1981.04.27 |
| 申请号 |
JP19790121672 |
申请日期 |
1979.09.21 |
| 申请人 |
SHINETSU CHEMICAL CO |
发明人 |
HONDA MITSUO;SEKIKAWA MASATO;URAKABE KENGO;OKAMOTO HARUO;KUROYANAGI ITSUO |
| 分类号 |
G03F1/60;H01L21/027 |
主分类号 |
G03F1/60 |
| 代理机构 |
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代理人 |
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| 主权项 |
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