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经营范围
发明名称
MICROWAVE PLASMA SURFACE PROCESSOR
摘要
申请公布号
JPS5641382(A)
申请公布日期
1981.04.18
申请号
JP19790116758
申请日期
1979.09.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YASUI TAKESHI;HIROSE MASAHIKO;YOTSUYANAGI MASAHIKO
分类号
C23F4/00;C23F1/08
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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