| 摘要 |
PURPOSE:To prevent the injury of the fingers by carrying a photo-mask; washing both surfaces of the mask with the mask being vertically positioned; and automatically performing the uniform washing. CONSTITUTION:A cassette 6 enclosing a mask 7 is placed on a slider 3, and washing drums 20 and 20' are rotated. When clampers 9 and 9' are diven to hold the mask 7 in the cassette 6, the upper and lower ends of the mask 7 move the tapered channels of the clampers and the mask 7 is vertically positioned. At this time, an air cylinder 12 is driven to draw holders 17 and 17' nearer and to compress and hold the right and left edges 7b and 7b' of the mask. Then, the clampers are brought back, and an air cylinder 11 is driven to send te mask 7 to rotary drums 20 and 20' on a rail 19. Pure water is supplied from holes 20b and 20b', and washing is performed by sponges 20a and 20a'. Since the mask 7 is vertically positioned by the drums 20 and 20', both surfaces are washed completely independently, and one surface is not contaminated by the other surface. After the washing, the mask and the holders are brought back and enclosed in the grooves of the cassette, thereby, the holding is released, and the mask washing is finished. |
