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发明名称
MANUFACTURE OF SILICON GATE MIS SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5618467(A)
申请公布日期
1981.02.21
申请号
JP19790093771
申请日期
1979.07.25
申请人
HITACHI LTD
发明人
TANIGAKI YUKIO;OSA YASUNOBU
分类号
H01L29/417;H01L29/78
主分类号
H01L29/417
代理机构
代理人
主权项
地址
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