| 摘要 |
PURPOSE:To reduce the volume of vacuum portion and miniaturize a fan type electrode device by integrally providing a nonmagnetic frame metal with paths for charged particles between paired fan type electrodes of a coaxial and cylindrical plate form. CONSTITUTION:The external and internal fan type electrodes 4a and 4b, having a coaxial and cylindrical plate form, are clamped with the nonmagnetic frame metal 15 through the insulating packings 11a and 11b by means of the bolt 13. The frame metal 13 is provided with the inlet and outlet flanges 16a and 16b with the window 18 leading to the space 20 formed in the cylindrical plate in the middle of the frame metal. Thus, by integrally combining the fan type electrodes 4a and 4b with the frame metal 15, an ion beam path consisting of the window 18 and the space 20 is sealed up and hence a vacuum condition is easily produced, so that the volume of the vacuum portion can be reduced and the device can therefore be wholly miniaturized. |
