| 摘要 |
<p>PURPOSE:To execute the response at a high speed by allowing a thermal disturbance to escape to both ends of a heating part of a sensor pipe and setting the gas to be measured, to a stabilized state. CONSTITUTION:To a sensor pipe 1 made of stainless steel, a sleeve 3 made of SUS is attached through an epoxy compound adhesive agent, and a nichrome heating resistance wire 2 is wound to the upstream side and the downstream side. Subsequently, by integrating these two resistance wires into a bridge circuit, a flow rate sensor for outputting a temperature variation as a voltage variation through an amplifier is constituted. In such a way, a thermal diffusion from a heating part comes to be generated easily by the sleeve 3, a thermal time constant becomes small and a response speed becomes high. That is, in the process in which gas to be measured flows to the sensor part and in the process after said gas has passed through, a thermal disturbance which becomes an unstable factor is allowed to escape to both ends of the heating part of the sensor pipe, and a temperature difference between the upstream side and the downstream side of the sensor part can be detected exactly.</p> |
