发明名称 PELLET POSITIONING MECHANISM
摘要 PURPOSE:To obtain a precise and secure positioning when performing a bonding by holding the corner section of the upper periphery of a pellet with the V-type grooves located at the point of a pair of positioning nails and then by performing positioning of the pellet using the positioning hole of a reversed guadrangular pyramid type cavity. CONSTITUTION:A pair of positioning nails 7, having a V-shaped groove 6 at the point approaching each other on a supporting base 5, is provided. At the approaching center section of the nails, a positioning hole 11, which roughly determines the position directional property of the pellet 2, is provided. The positioning hole 11 is a cavity with a reversed quadrangular pyramid shape which depth is less than the thickness of the pellet, it has a flat bottom and a hole 12 is provided for vacuum adhorption. As a result, the pellet 2 brought on the supporting base 5 is put in the positioning hole 11 and a coarse positioning is performed, and in order to have a precise and secure positioning with a pair of positioning nails, the feeding of the pellet to a collet is performed precisely and securely, thereby preventing a bonding miss and a pellet damage as well as enabling to perform an automation easily.
申请公布号 JPS55166932(A) 申请公布日期 1980.12.26
申请号 JP19790074679 申请日期 1979.06.15
申请人 HITACHI LTD 发明人 FUJIOKA SHIYUNICHIROU
分类号 H01L21/677;H01L21/58;H01L21/68 主分类号 H01L21/677
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