| 摘要 |
PROBLEM TO BE SOLVED: To provide machining tools and a method for machining a piezo electric element and other material whose thickness each is rather thinner than that of manufacturing limitations. SOLUTION: A groove and/or a difference-in-level in a ring shape, a quardrangle shape, or other shapes, are formed up over the upper surface of a first machining auxiliary fixture 11, and a second machining auxiliary fixture 19 in a cylindrical shape, or other shapes somewhat higher than the depth of the groove or the difference-in-level, is fitted into the groove or the difference-in- level, a piezo electric element ground material 13 is set up, which is in a cylindrical shape or other shapes, identical to the projected height of the second machining auxiliary fixture 19 over the upper surface of the first machining auxiliary fixture 11, identical to the height of a projection, or somewhat lower or higher than the projection, and a thus formed work piece extremely thin in thickness is polished so as to be processed by the use of two lapping plates formed of a lower lapping plate 17, and of an upper lapping plate 18.
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