发明名称 LASER ANNEALING DEVICE
摘要 PURPOSE:To enable to heat uniformly a material to be heated by a method wherein a laser beam whose strength distribution in the sectional area of beam has a smooth trapezoidal form or resembled to it is applied to a part to be irradiated of the material to be heated. CONSTITUTION:An output of a laser oscillator 1 operating in the multitransverse mode is fed to an optical fiber 3 through a condenser 2, and the beam receives a higher mode change during the passing in the fiber 3. The strength distribution in the sectional area of beam at the irradiating out end is a smooth distribution having a trapezoidal form or resembled to it being fixed by the distribution of a refractive index in the fiber. Therefore by applying the beam to the part to be irradiated of a material 4 to be heated, the material 4 can be heated uniformly.
申请公布号 JPS55153327(A) 申请公布日期 1980.11.29
申请号 JP19790061993 申请日期 1979.05.18
申请人 发明人
分类号 B23K26/00;C21D1/09;H01L21/20;H01L21/26;H01L21/265;H01L21/268;H01S3/00 主分类号 B23K26/00
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