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发明名称
SURFACE TREATMENT OF SILICON SUBSTRATE
摘要
申请公布号
CS201468(B1)
申请公布日期
1980.11.28
申请号
CS19790001790
申请日期
1979.03.19
申请人
HERMANSKY,VOJTECH,CS;POTOCEK,JOSEF,CS
发明人
HERMANSKY,VOJTECH,CS;POTOCEK,JOSEF,CS
分类号
(IPC1-7):C23C15/00
主分类号
(IPC1-7):C23C15/00
代理机构
代理人
主权项
地址
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