| 摘要 |
PURPOSE:To reduce oxides easily and at low cost by irradiation of hydrogen plasma onto oxides. CONSTITUTION:While exhausting gas in the discharge tube 2 by means of a vacuum pump, hydrogen gas is introduced through inlet 3 into the tube 2 to keep the pressure inside the tube 2 at approx. 10<-5>-10<-2> Torr, during which period a DC current is flowed in the coil 1 to cause an electron cyclotron resonance magnetic field to generate and at the same time a high-power microwave is sent through the air-tighted window 6 from the wave guide 5 to cause the hydrogen electron cyclotron resonance (ECR) plasma 7 to generate in order to irradiate the hydrogen plasma onto the metal oxide 9 put on the base 8 inside the tube 2 for reduction. In order to enhance the reduction rate, it is desirable to heat the metal oxide 9 through the base 8 and then to raise the diffusing speed of hydrogen atom and water formed inside the reductive layer. |
