发明名称 |
DEPOSITION DRUM SYSTEM TO PREVENT SAGGING OF SUBSTRATE FOR SUPERCONDUCTING COATED CONDUCTOR |
摘要 |
A technical subject of the present invention is to provide a deposition drum for preventing a supper-conductive wire material from sagging and a deposition apparatus including the same. The deposition drum includes a drum body around which a supper-conductive wire material is wound; and an elastic member coupled to an end of the super-conductive wire material to provide elasticity to the drum body such that the super-conductive wire material is tightly wound around the drum body. Thus, a degree of tight closing of the super-conductive wire material to the drum body is controlled by the elastic member including in the drum so that the super-conductive wire material is prevented from sagging. Accordingly, the supper-conductive wire material is prevented from being damaged due to the sagging of the super-conductive wire material. In addition, one super-conductive wire material is stacked on another super-conductive wire material so that the super-conductive wire material may be smoothly deposited. |
申请公布号 |
KR20160070494(A) |
申请公布日期 |
2016.06.20 |
申请号 |
KR20140177518 |
申请日期 |
2014.12.10 |
申请人 |
KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HA, DONG WOO;KO, ROCK KIL;KIM, HO SUP;JO, YOUNG SIK |
分类号 |
H01L39/24 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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