| 摘要 |
A flow path for measurement (26) is formed on a detection unit (14) forming a thermal flow sensor (10). A temperature sensor (30) is arranged on an upstream side in a fluid flowing direction of the flow path for measurement (26), and a heater (32) is arranged on a downstream side in a fluid flowing direction of the flow path for measurement (26). Also, a heat transfer prevention wall (40) is installed between the temperature sensor (30) and the heater (32). Moreover, it is preferable to install a stoppage means such as an orifice (42) on a downstream side of the heat transfer prevention wall (40) and between the temperature sensor (30) and the heater (32). |
