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发明名称
COATING FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS55127019(A)
申请公布日期
1980.10.01
申请号
JP19790031451
申请日期
1979.03.16
申请人
NIPPON ELECTRIC CO
发明人
MUKOUHARA HIROAKI
分类号
H01L21/28;H01L21/283
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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