| 摘要 |
PURPOSE:To obtain a distribution of a uniform film thickness on the substrate by increasing the distance between the electrode and the substrate from the central part to the end part of the electrode gradually. CONSTITUTION:The distance D between the electrode 3 and the substrate holder 4 (actually, distance between the electrode and the material to be coated) at the circumferential part is made greater than that at the central part. When the diameter of the central part of the electrode, outside diameter of the electrode and distance D are properly selected, a distribution of a uniform film thickness can be obtaned at a greater attaching speed. |
