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发明名称
METHOD AND DEVICE FOR PLASMA TREATMENT
摘要
申请公布号
JPS5599726(A)
申请公布日期
1980.07.30
申请号
JP19790007088
申请日期
1979.01.26
申请人
HITACHI LTD
发明人
YOSHIDA HIROBUMI
分类号
H01L21/302;H05H1/00;H05H1/46
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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