| 摘要 |
PURPOSE:To obtain a composite piezoelectric element having large anisotropy by alternately laminating green sheets impregnated with the slurry of a piezoelectric material on cloth of organic fiber and piezoelectric green sheets containing no organic fiber, and then baking the laminate to remove the fiber. CONSTITUTION:Fine powder of lead titanate-zirconate is prepared with high purity PbO, etc., through a step of manufacturing ceramics, and a piezoelectric green sheet 1a of sole unit is manufactured from slurry added with binder, such as PVA, etc., water and the like. Cloth 3 of organic fiber is dipped in the slurry thereby to obtain a composite piezoelectric green sheet 2a. Then, the sheets 1a and the sheets 2a are laminated, heated and pressurized thereby obtain a laminated green sheet 5a. Thereafter, the sheet 5a is heat treated at 500-700 deg.C, and pores 4 are formed as a composite piezoelectric laminate 5b. The laminate 5b is baked at 1200-1350 deg.C in a PbO atmosphere as a composite piezoelectric element 5. Thus, its anisotropy can be increased. |
