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发明名称
ELECTRON BEAM ENERGY MONITOR
摘要
申请公布号
JPS5580099(A)
申请公布日期
1980.06.16
申请号
JP19780154353
申请日期
1978.12.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIKUCHI HIROSHI
分类号
H01J49/44;G01T1/29;G21K5/04
主分类号
H01J49/44
代理机构
代理人
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地址
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