| 摘要 |
<p>PURPOSE:To obtain the sensor which can detect gas and water vapor in high sensitivity, by forming oxide supermicro particle film on the insulating support providing electrode and forming Pd supermicro particle film on the film under inactive gas atmosphere. CONSTITUTION:The electrodes 2, 3 of pair are formed on the insulation substrate 1 of glass and ceramic, and the supermicro particle film 4 of metal oxide such as Sn, Ti, Zn and Ni is formed with vacuum evaporation method. Pd microparticle film or Pd supermicro particles and the hybrid film 5 with the said metal oxide supermicro particles are evaporated on the film 4 under inactive gas atmosphere to obtain the sensor for gas and water content detection. The film thickness of the Pd supermicron particle film 5 is around several mum and the average particle diameter is several tens to hundreds of Angstrom the same as the metal oxide supermicron particles.</p> |
