VAPOR PHASE EPITAXIAL GROWING DEVICE,申请号JP19780145911-传众专利搜索

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发明名称	VAPOR PHASE EPITAXIAL GROWING DEVICE
摘要
申请公布号	JPS5571696(A)	申请公布日期	1980.05.29
申请号	JP19780145911	申请日期	1978.11.22
申请人	MITSUBISHI ELECTRIC CORP	发明人	ISHII JIYUN;TAKAHASHI KAZUHISA
分类号	C30B25/14;C30B25/02;H01L21/205	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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