| 摘要 |
PURPOSE:To strengthen adhesion between a substrate and magnetic material by forming an airtight layer, provided between the substrate and magnetic material, in two layers and then by thermally processing the 1st layer together with the substrate. CONSTITUTION:On single-crystal substrate 5 of crystal, sapphire, etc., metal such as Ti and Cr is vapor-deposited and then bonded by sputtering to a film thickness of approximate 500Angstrom and through a heat treatment in the air, 1st closely contacted layer 6 is formed (preferably at 370-420 deg.C for about one hour when a Ti layer is provided on the crystal substrate). Next, 2nd airtight layer 7 of Ti, Cr, etc., of approximate 500Angstrom in thickness is formed on the above-mentioned closely contacted layer 6 and on it, magnetic material 8 of Permalloy, erc., is further bonded to form a thin-film magnetic head core. |
