| 摘要 |
PURPOSE:The above mentioned ultra hard alloy having a long life high capacity, mainly composed of WC and coating the composite compounds of Hf compound and Ti compound on the surface of ultra hard alloy mainly combined with Co. CONSTITUTION:The iodine 11 is heated controlling the temperature of the thermostat 10 and a fixed quantity of I2 gas is introduced to the heated Ti sponge 8 and Hf sponge 9 and then, TiI4 and HfI4 are formed. The above TiI4, HfI4 and reaction gas, for example, C4H10, are introduced on the substrate 4 heated at a fixed temperature and composite coating film (Ti, Hf)C is formed making eutectic mixture of TiC and HfC on the substrate 4. The composite coating film having a uniform thickness, is able to form on the substrate 4 made of ultra hard alloy mainly composed of WC by carrying out film formation under a suitable reduced pressure. (Ti, Hf)N is formed by using NH3 as reaction gas and (Ti, Hf)C.N is formed by using mixed gas of hydrocarbon and NH3. |
