发明名称 Method of fabricating MNOS transistors having implanted channels
摘要 The method of forming an MNOS transistor having a stepped channel oxide region utilizes intentional undercutting of the oxide in the channel region to provide a self-aligned mask for ion implanting a region of the same conductivity type, but more heavily doped which will be centrally located beneath the thin portion of the channel region in order to increase the threshold window of the device while saving a photomask operation.
申请公布号 US4197630(A) 申请公布日期 1980.04.15
申请号 US19780936778 申请日期 1978.08.25
申请人 RCA CORP 发明人 KAMPRATH, THEODORE
分类号 H01L27/112;H01L21/265;H01L21/8246;H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):B01J17/00 主分类号 H01L27/112
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