Diffusion boat and grip

摘要

A tool is disclosed for gripping an elongated transport or diffusion boat having a concave surface extending from end to end which is grooved repeatedly in one direction to support each of a plurality of disc like semiconductor wafers peripherally in vertical side-by-side relationship. Each end of the boats is provided with a pair of horizontally aligned spaced apart notches. The tool for gripping the boat consists of a pair of spaced apart parallel arm members each of which carries a pair of linearly aligned finger sections adapted for removable insertion into the notches. Means are provided to move the arm members laterally toward each other thereby to insert the fingers simultaneously into all of the notches to grip the boat.